公开(公告)号：US09488570B2

公开(公告)日：2016-11-08

申请号：US14511842

申请日：2014-10-10

Applicant: MKS Instruments, Inc. ,  Pason Systems Corp.

Inventor： Vidi A. Saptari

IPC: G01N21/31 ,  G01N21/05 ,  G01N21/3504 ,  G01N33/22 ,  G01N21/359 ,  G01N21/3518

CPC classification number: G01N21/3518 ,  G01N21/05 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/225 ,  G01N2021/3536 ,  G01N2021/3595 ,  G01N2201/023

Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

Abstract translation: 本文描述的是使用吸收光谱测量和监测样品或样品流的化学成分和/或杂质含量的光谱系统和方法。 具体来说，在某些实施方案中，本发明涉及使用样品压力变化来改变为样品接收的吸收光谱的幅度（例如，依赖于波长的信号），从而避免了对参考或“零”样品的需要。 不是使用参考或“零”样本，本文所述的实施例在第一压力和第二（不同）压力下都从含样品的电池获得光谱/信号。

公开(公告)号：US09651422B2

公开(公告)日：2017-05-16

申请号：US14518974

申请日：2014-10-20

Applicant: MKS Instruments, Inc.

Inventor： Vidi A. Saptari

IPC: G01J3/45 ,  G01J3/06 ,  G01J3/32 ,  G01N21/25 ,  G01N21/31 ,  G01J3/12 ,  G01N21/33 ,  G01N21/3504

CPC classification number: G01J3/06 ,  G01J3/32 ,  G01J2003/1247 ,  G01N21/255 ,  G01N21/314 ,  G01N21/33 ,  G01N21/3504 ,  G01N2021/3174 ,  G01N2201/129

Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.

公开(公告)号：US09739708B2

公开(公告)日：2017-08-22

申请号：US15290684

申请日：2016-10-11

Applicant: MKS Instruments, Inc. ,  Pason Systems Corp.

Inventor： Vidi A. Saptari

IPC: G01N21/3518 ,  G01N33/22 ,  G01N21/3504 ,  G01N21/05 ,  G01N21/31 ,  G01N21/359 ,  G01N21/35

CPC classification number: G01N21/3518 ,  G01N21/05 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/225 ,  G01N2021/3536 ,  G01N2021/3595 ,  G01N2201/023

Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

公开(公告)号：US20170030829A1

公开(公告)日：2017-02-02

申请号：US15290684

申请日：2016-10-11

Applicant: MKS Instruments, Inc. ,  Pason Systems Corp.

Inventor： Vidi A. Saptari

IPC: G01N21/3518 ,  G01N33/22

CPC classification number: G01N21/3518 ,  G01N21/05 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/225 ,  G01N2021/3536 ,  G01N2021/3595 ,  G01N2201/023

Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

Abstract translation: 本文描述的是使用吸收光谱测量和监测样品或样品流的化学成分和/或杂质含量的光谱系统和方法。 具体来说，在某些实施方案中，本发明涉及使用样品压力变化来改变为样品接收的吸收光谱的幅度（例如，依赖于波长的信号），从而避免了对参考或“零”样品的需要。 不是使用参考或“零”样本，本文所述的实施例在第一压力和第二（不同）压力下都从含样品的电池获得光谱/信号。