Invention Grant
- Patent Title: Methods of forming diffusion breaks on integrated circuit products comprised of finFET devices
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Application No.: US15226165Application Date: 2016-08-02
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Publication No.: US09653583B1Publication Date: 2017-05-16
- Inventor: Wei Zhao , Haiting Wang , Hongliang Shen , Zhenyu Hu , Min-Hwa Chi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/66 ; H01L29/66 ; H01L21/02 ; H01L21/762 ; H01L21/3105

Abstract:
One illustrative method disclosed herein includes, among other things, forming a first gate structure above a fin, forming epi semiconductor material on the fin, performing at least one first etching process through a patterned sacrificial layer of material to remove at least a gate cap layer and sacrificial gate materials of the first gate structure so as to define a first isolation cavity that exposes the fin while leaving the second gate structure intact, performing at least one second etching process through the first isolation cavity to remove at least a portion of a vertical height of the fin and thereby form a first isolation trench, removing the patterned sacrificial layer of material, and forming a layer of insulating material above the epi semiconductor material and in the first isolation trench and in the first isolation cavity.
Information query
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