发明授权
- 专利标题： Target for spark vaporization with physical limiting of the propagation of the spark
-
申请号： US13641499申请日： 2011-01-10
-
公开(公告)号： US09657389B2公开(公告)日： 2017-05-23
- 发明人: Siegfried Krassnitzer , Juerg Hagmann
- 申请人： Siegfried Krassnitzer , Juerg Hagmann
- 申请人地址： CH Pfäffikon SZ
- 专利权人： OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- 当前专利权人： OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- 当前专利权人地址： CH Pfäffikon SZ
- 代理机构： Pearne & Gordon LLP
- 优先权： DE102010020737U 20100517
- 国际申请： PCT/EP2011/000057 WO 20110110
- 国际公布： WO2011/128004 WO 20111020
- 主分类号： C23C14/00
- IPC分类号： C23C14/00 ; C23C14/32 ; H01J37/305 ; H01J37/32
摘要：
The present invention relates to a target for an ARC source having a first body (3) of a material to be vaporized, which essentially comprises in one plane a surface which is intended to be vaporized, wherein the surface surrounds in this plane a central area, characterized in that in the central area a second body (7) is provided, which is preferably in the form of a disk and is electrically isolated from the first body (3), in such a way that the second body (7) can essentially provide no electrons for maintaining a spark.
公开/授权文献
信息查询
IPC分类:
