Invention Grant
- Patent Title: Gas lock, and coating apparatus comprising a gas lock
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Application No.: US13881049Application Date: 2011-10-27
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Publication No.: US09657393B2Publication Date: 2017-05-23
- Inventor: David Pocza , Stefan Reber , Martin Arnold , Norbert Schillinger
- Applicant: David Pocza , Stefan Reber , Martin Arnold , Norbert Schillinger
- Applicant Address: DE Munich
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee Address: DE Munich
- Agency: Gesmer Updegrove LLP
- Priority: DE102010049861 20101027
- International Application: PCT/EP2011/005439 WO 20111027
- International Announcement: WO2012/055561 WO 20120503
- Main IPC: C23C16/54
- IPC: C23C16/54 ; C23C14/56 ; H01J37/32 ; C23C16/455 ; C23C16/44 ; C23C16/52 ; F17D3/00
Abstract:
The present invention relates to a gas lock for separating two gas chambers, which while taking up minimal space makes it possible to achieve the separation of gases without contact with the product/educt/transporting system. The gas lock according to the invention is distinguished by the integration of a measuring chamber for measuring at least one physical and/or chemical property. Also, the present invention relates to a coating device which comprises a gas lock according to the invention. Also provided are possibilities for using the gas lock according to the invention.
Public/Granted literature
- US20130276900A1 GAS LOCK, AND COATING APPARATUS COMPRISING A GAS LOCK Public/Granted day:2013-10-24
Information query
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