Invention Grant
- Patent Title: Finfet crosspoint flash memory
-
Application No.: US15089647Application Date: 2016-04-04
-
Publication No.: US09660105B2Publication Date: 2017-05-23
- Inventor: Ramachandra Divakaruni , Arvind Kumar , Carl J. Radens
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/311 ; H01L29/788 ; H01L27/11521 ; H01L29/66 ; H01L29/06 ; H01L21/02 ; H01L21/308 ; H01L29/78 ; H01L27/12 ; H01L27/115 ; H01L29/786 ; H01L21/8234 ; H01L21/306

Abstract:
A flash memory device in a dual fin single floating gate configuration is provided. Semiconductor fins are formed on a stack of a back gate conductor layer and a back gate dielectric layer. Pairs of semiconductor fins are formed in an array environment such that shallow trench isolation structures can be formed along the lengthwise direction of the semiconductor fins within the array. After formation of tunneling dielectrics on the sidewalls of the semiconductor fins, a floating gate electrode is formed between each pair of proximally located semiconductor fins by deposition of a conformal conductive material layer and an isotropic etch. A control gate dielectric and a control gate electrode are formed by deposition and patterning of a dielectric layer and a conductive material layer.
Public/Granted literature
- US20160218222A1 FINFET CROSSPOINT FLASH MEMORY Public/Granted day:2016-07-28
Information query
IPC分类: