发明授权
- 专利标题: Microelectromechanical system (MEMS) on application specific integrated circuit (ASIC)
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申请号: US14403571申请日: 2013-06-28
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公开(公告)号: US09663353B2公开(公告)日: 2017-05-30
- 发明人: Gerald Ofner , Thorsten Meyer , Reinhard Mahnkopf , Christian Geissler , Andreas Augustin
- 申请人: Intel IP Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: INTEL IP CORPORATION
- 当前专利权人: INTEL IP CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 国际申请: PCT/US2013/048552 WO 20130628
- 国际公布: WO2014/209358 WO 20141231
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; B81B7/00 ; B81C1/00
摘要:
In embodiments, a package assembly may include an application-specific integrated circuit (ASIC) and a microelectromechanical system (MEMS) having an active side and an inactive side. In embodiments, the MEMS may be coupled directly to the ASIC by way of one or more interconnects. The MEMS, ASIC, and one or more interconnects may define or form a cavity such that the active portion of the MEMS is within the cavity. In some embodiments, the package assembly may include a plurality of MEMS coupled directly to the ASIC by way of a plurality of one or more interconnects. Other embodiments may be described and/or claimed.
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