Invention Grant
- Patent Title: Energy beam size verification
-
Application No.: US15077155Application Date: 2016-03-22
-
Publication No.: US09664504B2Publication Date: 2017-05-30
- Inventor: Anders Snis
- Applicant: Arcam AB
- Applicant Address: SE Moelndal
- Assignee: Arcam AB
- Current Assignee: Arcam AB
- Current Assignee Address: SE Moelndal
- Agency: Alston & Bird LLP
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01B11/14 ; B23K15/00 ; B23K26/04 ; B22F3/105 ; G01B11/00 ; G01B15/00 ; G01P3/36 ; G01P21/00 ; B23K15/02 ; B23K26/03 ; B23K26/046 ; B23K26/70 ; B33Y10/00 ; B33Y30/00 ; B33Y50/02 ; B33Y40/00

Abstract:
A method for verifying a size of an energy beam spot, said method comprising the steps of providing a first beam spot having a predetermined size and power at a first position on a work piece, varying a focus and/or astigmatism lens setting for said first beam spot until max intensity for the beam spot is detected, comparing the detected settings of said focus lens and/or astigmatism lens for said maximum intensity of the beam spot with stored settings of said focus lens and/or astigmatism lens for the beam spot with said predetermined size and power, repeating step a-c for different predetermined beam powers, repeating step a-d for different positions on said work piece, wherein said beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.
Public/Granted literature
- US20160202042A1 ENERGY BEAM SIZE VERIFICATION Public/Granted day:2016-07-14
Information query