Invention Grant
- Patent Title: Image intensifier tube design for aberration correction and ion damage reduction
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Application No.: US13957890Application Date: 2013-08-02
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Publication No.: US09666419B2Publication Date: 2017-05-30
- Inventor: Ximan Jiang , Qing Li , Stephen Biellak
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J40/16
- IPC: H01J40/16 ; H01J31/50

Abstract:
The disclosure is directed to image intensifier tube designs for field curvature aberration correction and ion damage reduction. In some embodiments, electrodes defining an acceleration path from a photocathode to a scintillating screen are configured to provide higher acceleration for off-axis electrons along at least a portion of the acceleration path. Off-axis electrons and on-axis electrons are accordingly focused on the scintillating screen with substantial uniformity to prevent or reduce field curvature aberration. In some embodiments, the electrodes are configured to generate a repulsive electric field near the scintillating screen to prevent secondary electrons emitted or deflected by the scintillating screen from flowing towards the photocathode and forming damaging ions.
Public/Granted literature
- US20140063502A1 Image Intensifier Tube Design for Aberration Correction and Ion Damage Reduction Public/Granted day:2014-03-06
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