发明授权
- 专利标题: Semiconductor device with composite drift region and related fabrication method
-
申请号: US14279991申请日: 2014-05-16
-
公开(公告)号: US09666671B2公开(公告)日: 2017-05-30
- 发明人: Zhihong Zhang , Hongning Yang , Jiang-Kai Zuo
- 申请人: Zhihong Zhang , Hongning Yang , Jiang-Kai Zuo
- 申请人地址: US TX Austin
- 专利权人: NXP USA, Inc.
- 当前专利权人: NXP USA, Inc.
- 当前专利权人地址: US TX Austin
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L29/78 ; H01L29/66 ; H01L29/36 ; H01L29/06 ; H01L29/08 ; H01L21/265
摘要:
A device includes a semiconductor substrate, a body region in the semiconductor substrate having a first conductivity type and in which a channel is formed during operation, source and drain regions in the semiconductor substrate and having a second conductivity type, the source region being disposed on the body region, and a composite drift region in the semiconductor substrate, having the second conductivity type, and through which charge carriers from the source region drift to reach the drain region after passing through the channel. The composite drift region includes a first section adjacent the channel, a second section adjacent the drain region, and a third section disposed between the first and second sections. The first and second sections have a lower effective dopant concentration level than the third section.
公开/授权文献
信息查询
IPC分类: