- 专利标题: Flexible electronics for wearable healthcare sensors
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申请号: US15262912申请日: 2016-09-12
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公开(公告)号: US09670061B1公开(公告)日: 2017-06-06
- 发明人: Huan Hu , Ning Li , Xiao Hu Liu , Katsuyuki Sakuma
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L21/762
- IPC分类号: H01L21/762 ; B81B3/00 ; B81C1/00
摘要:
Aspects include a method of manufacturing a flexible electronic structure that includes a metal or doped silicon substrate. Aspects include depositing an insulating layer on a silicon substrate. Aspects also include patterning a metal on a silicon substrate. Aspects also include selectively masking the structure to expose the metal and a portion of the silicon substrate. Aspects also include depositing a conductive layer including a conductive metal on the structure. Aspects also include plating the conductive material on the structure. Aspects also include spalling the structure.
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