Invention Grant
- Patent Title: Digital exposure device using GLV and digital exposure device using DMD
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Application No.: US14017921Application Date: 2013-09-04
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Publication No.: US09671700B2Publication Date: 2017-06-06
- Inventor: ChangHoon Kim , JaeHyuk Chang , Su-Yeon Sim , KiBeom Lee , HiKuk Lee , Sanghyun Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2013-0036884 20130404
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G03B27/32 ; G03B27/54 ; G03B27/72 ; G03F7/20 ; G02B26/08

Abstract:
A digital exposure device including a GLV or a DMD. The digital exposure device also includes: a stage to support and move a substrate in a scan direction; an optical system disposed between the stage and the GLV or the DMD, to form a pattern on the substrate by modulating light received from the GLV or the DMD; and a control unit to control the a width of the pattern by a unit, the unit being obtained by dividing the width of the pattern by a natural number m, in the second direction.
Public/Granted literature
- US20140300881A1 DIGITAL EXPOSURE DEVICE USING GLV AND DIGITAL EXPOSURE DEVICE USING DMD Public/Granted day:2014-10-09
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