公开(公告)号：US09671700B2

公开(公告)日：2017-06-06

申请号：US14017921

申请日：2013-09-04

Applicant: Samsung Display Co., Ltd.

Inventor： ChangHoon Kim ,  JaeHyuk Chang ,  Su-Yeon Sim ,  KiBeom Lee ,  HiKuk Lee ,  Sanghyun Lee

IPC: G02B5/18 ,  G03B27/32 ,  G03B27/54 ,  G03B27/72 ,  G03F7/20 ,  G02B26/08

CPC classification number: G03F7/70291 ,  G02B26/0808 ,  G03F7/70275

Abstract: A digital exposure device including a GLV or a DMD. The digital exposure device also includes: a stage to support and move a substrate in a scan direction; an optical system disposed between the stage and the GLV or the DMD, to form a pattern on the substrate by modulating light received from the GLV or the DMD; and a control unit to control the a width of the pattern by a unit, the unit being obtained by dividing the width of the pattern by a natural number m, in the second direction.