Invention Grant
- Patent Title: Semiconductor arrangement and formation thereof
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Application No.: US14097516Application Date: 2013-12-05
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Publication No.: US09673194B2Publication Date: 2017-06-06
- Inventor: Harry-Hak-Lay Chuang , Wei Cheng Wu , Shih-Chang Liu , Ming Chyi Liu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW
- Agency: Cooper Legal Group LLC
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/265 ; H01L21/8234 ; H01L21/762 ; H01L29/66 ; H01L29/06 ; H01L21/28 ; H01L29/788 ; H01L27/11521

Abstract:
A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a first gate structure on a first side of an active area and a second gate structure on a second side of the active area, where the first gate structure and the second gate structure share the active area. A method of forming the semiconductor arraignment includes forming a deep implant of the active area before forming the first gate structure, and then forming a shallow implant of the active area. Forming the deep implant prior to forming the first gate structure alleviates the need for an etching process that degrades the first gate structure. The first gate structure thus has a desired configuration and is able to be formed closer to other gate structures to enhance device density.
Public/Granted literature
- US20150162329A1 SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF Public/Granted day:2015-06-11
Information query
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