Invention Grant
- Patent Title: Apparatus and method for forming organic thin film and manufacturing method of organic thin film device using the same
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Application No.: US14715878Application Date: 2015-05-19
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Publication No.: US09673395B2Publication Date: 2017-06-06
- Inventor: Jin Hyoung Lee , Geun Sik Cho , Il Soo Moon , Yong Sul Song
- Applicant: AMOGREENTECH CO., LTD.
- Applicant Address: KR Gimpo-si
- Assignee: AMOGREENTECH CO., LTD.
- Current Assignee: AMOGREENTECH CO., LTD.
- Current Assignee Address: KR Gimpo-si
- Agency: Cantor Colburn LLP
- Priority: KR10-2012-0133720 20121123; KR10-2012-0133729 20121123
- Main IPC: B05B7/16
- IPC: B05B7/16 ; B05C11/10 ; H01L51/00 ; H01L51/56 ; H01L51/52 ; H01L51/50

Abstract:
Provided is an organic thin film forming apparatus, an organic thin film forming method, and a method of manufacturing an organic thin film device using the same, in which an organic light-emitting layer (photoactive layer) and/or an electron transport layer can be formed on a substrate when an organic light emitting diode (OLED) or an organic solar cell is manufactured. The organic thin film forming apparatus includes: a solution spray unit for spraying a solution on a substrate; and a hot gas spray unit for spraying a hot gas onto fine liquid droplets that have been sprayed from the solution spray unit and that are in flight, to thereby evaporate a solvent contained in the fine liquid droplets.
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