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公开(公告)号:US09673395B2
公开(公告)日:2017-06-06
申请号:US14715878
申请日:2015-05-19
发明人: Jin Hyoung Lee , Geun Sik Cho , Il Soo Moon , Yong Sul Song
CPC分类号: H01L51/0007 , B05B7/16 , H01L51/0003 , H01L51/0008 , H01L51/0029 , H01L51/0097 , H01L51/5012 , H01L51/5056 , H01L51/5072 , H01L51/5092 , H01L51/5206 , H01L51/5221 , H01L51/56 , H01L2251/5338 , Y02E10/549 , Y02P70/521
摘要: Provided is an organic thin film forming apparatus, an organic thin film forming method, and a method of manufacturing an organic thin film device using the same, in which an organic light-emitting layer (photoactive layer) and/or an electron transport layer can be formed on a substrate when an organic light emitting diode (OLED) or an organic solar cell is manufactured. The organic thin film forming apparatus includes: a solution spray unit for spraying a solution on a substrate; and a hot gas spray unit for spraying a hot gas onto fine liquid droplets that have been sprayed from the solution spray unit and that are in flight, to thereby evaporate a solvent contained in the fine liquid droplets.