- 专利标题: Apparatus and method for treating substrate
-
申请号: US13537914申请日: 2012-06-29
-
公开(公告)号: US09679788B2公开(公告)日: 2017-06-13
- 发明人: Eunsun Jung , Woo Young Kim , Chan Young Heo , Jeong Seon Park
- 申请人: Eunsun Jung , Woo Young Kim , Chan Young Heo , Jeong Seon Park
- 申请人地址: KR Chungcheongnam-Do
- 专利权人: SEMES CO., LTD.
- 当前专利权人: SEMES CO., LTD.
- 当前专利权人地址: KR Chungcheongnam-Do
- 代理机构: Harness, Dickey & Pierce, PLC
- 优先权: KR10-2011-0064987 20110630; KR10-2011-0104768 20111013
- 主分类号: F26B5/00
- IPC分类号: F26B5/00 ; H01L21/67
摘要:
Provided are an apparatus and method for treating a substrate, and more particularly, to an apparatus and method for treating a substrate using a supercritical fluid. The apparatus for treating a substrate includes a process chamber in which an organic solvent remaining on a substrate is dissolved using a fluid provided as a supercritical fluid to dry the substrate and a recycling unit in which the organic solvent is separated from the fluid discharged from the process chamber to recycle the fluid.
公开/授权文献
- US20130000140A1 APPARATUS AND METHOD FOR TREATING SUBSTRATE 公开/授权日:2013-01-03
信息查询
IPC分类: