Invention Grant
- Patent Title: 3D NAND array with sides having undulating shapes
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Application No.: US15096785Application Date: 2016-04-12
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Publication No.: US09679849B1Publication Date: 2017-06-13
- Inventor: Shih-Hung Chen
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L23/528 ; G11C16/04 ; G11C16/08 ; G11C16/34 ; H01L27/1157 ; H01L27/11582 ; H01L23/522 ; H01L21/768

Abstract:
Area overhead is reduced between adjacent blocks of a 3D vertical channel memory device. In various embodiments, vertically oriented pillars that intersect layers of string select lines and word lines are arranged at intersections of a regular grid that is rotated, in a “twisted” array of pillars. Sides of shapes of the 3D NAND array structure are undulating, and follow undulating lines in which the outer pillars are disposed. For example, any of the string select lines, word lines, ground select lines, and ground lines have sides with undulating shapes.
Information query
IPC分类: