Invention Grant
- Patent Title: Electron microscope and method of operating same
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Application No.: US14960852Application Date: 2015-12-07
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Publication No.: US09685302B2Publication Date: 2017-06-20
- Inventor: Takashi Suzuki
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2014-248193 20141208
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/28 ; H01J37/285

Abstract:
An electron microscope is offered that is capable of achieving noise cancellation which results in a low level of noise and which can be implemented at high speed. An electron microscope (1) associated with the present invention includes: an electron beam source (11) for producing an electron beam; a noise detector (4) for detecting a part of the beam to thereby produce a beam detection signal and dividing a dividend by the beam detection signal; at least one image signal detector (6) for detecting an image signal obtained by making the beam impinge on a sample (A); and an arithmetic section (60) for performing a multiplication between an output signal of the image signal detector (6) and an output signal of the noise detector (4).
Public/Granted literature
- US20160189924A1 Electron Microscope and Method of Operating Same Public/Granted day:2016-06-30
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