公开(公告)号：US20180130635A1

公开(公告)日：2018-05-10

申请号：US15662576

申请日：2017-07-28

Applicant: JEOL Ltd.

Inventor： Takashi Suzuki

IPC: H01J37/24 ,  H01J37/244 ,  H01J37/22 ,  H01J37/073

CPC classification number: H01J37/24 ,  H01J37/073 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/0653 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/245 ,  H01J2237/24535 ,  H01J2237/2487

Abstract: There is provided an electron microscope capable of producing good images by reducing contrast nonuniformity. The electron microscope (1) includes: an electron beam source (11) for producing an electron beam; a noise cancelling aperture (12) and an amplifier (42) for detecting a part of the electron beam; an effective value computing circuit (44) and a low frequency cut-off circuit (46) for extracting a DC component of an effective value of a detection signal emanating from the amplifier (42); an image detector (15) for detecting a signal produced in response to impingement of the beam on a sample (A); a preamplifier circuit (20) and an amplifier circuit (30); a divider circuit (54) for performing a division of the output signal (X) from the amplifier circuit (30) by the output signal (Y) from the amplifier circuit (42) and producing a quotient signal indicative of the result of the decision (X/Y); and a multiplier circuit (58) for multiplying the quotient signal by a signal (Z) extracted by the low frequency cut-off circuit (46).

公开(公告)号：US09772976B2

公开(公告)日：2017-09-26

申请号：US13915652

申请日：2013-06-12

Applicant: JEOL Ltd.

Inventor： Takashi Suzuki

IPC: H01J37/28 ,  G06F17/18 ,  H01J37/285

CPC classification number: G06F17/18 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/06341 ,  H01J2237/24495 ,  H01J2237/24507

Abstract: An electron microscope and method of operating an electron microscope (1) has an electron beam source (11) for producing an electron beam, a noise canceling aperture (12) for detecting a part of the beam, an amplifier (42), an effective value calculating circuit (44) for extracting DC components of the output signal from the amplifier (42), a detector (15) for detecting a signal obtained in response to impingement of the beam on a sample (A), a preamplifier circuit (20), an amplifier circuit (30), a dividing circuit (54) for performing a division based on the output signal from the amplifier circuit (30) and on the output signal from the amplifier (42), and a multiplier circuit (58) for performing multiplication of the output signal from the dividing circuit (54) and the output from the effective value calculating circuit (44).

公开(公告)号：US10224176B2

公开(公告)日：2019-03-05

申请号：US15662576

申请日：2017-07-28

Applicant: JEOL Ltd.

Inventor： Takashi Suzuki

IPC: H01J37/24 ,  H01J37/073 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

Abstract: There is provided an electron microscope capable of producing good images by reducing contrast nonuniformity. The electron microscope (1) includes: an electron beam source (11) for producing an electron beam; a noise cancelling aperture (12) and an amplifier (42) for detecting a part of the electron beam; an effective value computing circuit (44) and a low frequency cut-off circuit (46) for extracting a DC component of an effective value of a detection signal emanating from the amplifier (42); an image detector (15) for detecting a signal produced in response to impingement of the beam on a sample (A); a preamplifier circuit (20) and an amplifier circuit (30); a divider circuit (54) for performing a division of the output signal (X) from the amplifier circuit (30) by the output signal (Y) from the amplifier circuit (42) and producing a quotient signal indicative of the result of the decision (X/Y); and a multiplier circuit (58) for multiplying the quotient signal by a signal (Z) extracted by the low frequency cut-off circuit (46).

公开(公告)号：US09685302B2

公开(公告)日：2017-06-20

申请号：US14960852

申请日：2015-12-07

Applicant: JEOL Ltd.

Inventor： Takashi Suzuki

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/285 ,  H01J2237/24495 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/2802

Abstract: An electron microscope is offered that is capable of achieving noise cancellation which results in a low level of noise and which can be implemented at high speed. An electron microscope (1) associated with the present invention includes: an electron beam source (11) for producing an electron beam; a noise detector (4) for detecting a part of the beam to thereby produce a beam detection signal and dividing a dividend by the beam detection signal; at least one image signal detector (6) for detecting an image signal obtained by making the beam impinge on a sample (A); and an arithmetic section (60) for performing a multiplication between an output signal of the image signal detector (6) and an output signal of the noise detector (4).

公开(公告)号：US20160189924A1

公开(公告)日：2016-06-30

申请号：US14960852

申请日：2015-12-07

Applicant: JEOL Ltd.

Inventor： Takashi Suzuki

IPC: H01J37/28 ,  H01J37/22

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/285 ,  H01J2237/24495 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/2802

Abstract: An electron microscope is offered that is capable of achieving noise cancellation which results in a low level of noise and which can be implemented at high speed. An electron microscope (1) associated with the present invention includes: an electron beam source (11) for producing an electron beam; a noise detector (4) for detecting a part of the beam to thereby produce a beam detection signal and dividing a dividend by the beam detection signal; at least one image signal detector (6) for detecting an image signal obtained by making the beam impinge on a sample (A); and an arithmetic section (60) for performing a multiplication between an output signal of the image signal detector (6) and an output signal of the noise detector (4).

Abstract translation: 提供能够实现噪声消除的电子显微镜，其导致低水平的噪声并且可以以高速实现。 与本发明相关的电子显微镜（1）包括：用于产生电子束的电子束源（11）; 噪声检测器（4），用于检测所述光束的一部分，从而产生光束检测信号，并通过所述光束检测信号来划分除数; 至少一个图像信号检测器（6），用于检测通过使光束照射在样品（A）上而获得的图像信号; 以及用于执行图像信号检测器（6）的输出信号和噪声检测器（4）的输出信号之间的相乘的运算部（60）。

公开(公告)号：US20130332116A1

公开(公告)日：2013-12-12

申请号：US13915652

申请日：2013-06-12

Applicant: JEOL Ltd.

Inventor： Takashi Suzuki

IPC: G06F17/18 ,  H01J37/285

CPC classification number: G06F17/18 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/06341 ,  H01J2237/24495 ,  H01J2237/24507

Abstract: An electron microscope and method of operating an electron microscope (1) has an electron beam source (11) for producing an electron beam, a noise canceling aperture (12) for detecting a part of the beam, an amplifier (42), an effective value calculating circuit (44) for extracting DC components of the output signal from the amplifier (42), a detector (15) for detecting a signal obtained in response to impingement of the beam on a sample (A), a preamplifier circuit (20), an amplifier circuit (30), a dividing circuit (54) for performing a division based on the output signal from the amplifier circuit (30) and on the output signal from the amplifier (42), and a multiplier circuit (58) for performing multiplication of the output signal from the dividing circuit (54) and the output from the effective value calculating circuit (44).

Abstract translation: 电子显微镜和操作电子显微镜（1）的方法具有用于产生电子束的电子束源（11），用于检测光束的一部分的噪声消除孔（12），放大器（42），有效 用于从放大器（42）提取输出信号的DC分量的检测器（15），用于检测响应于样品（A）上的束的撞击而获得的信号的检测器（15），前置放大器电路 ），放大器电路（30），分频电路（54），用于根据来自放大器电路（30）的输出信号和来自放大器（42）的输出信号进行分频;以及乘法器电路（58） 用于执行来自分频电路（54）的输出信号和来自有效值计算电路（44）的输出的乘法运算。