Invention Grant
- Patent Title: Load port device
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Application No.: US14199051Application Date: 2014-03-06
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Publication No.: US09685359B2Publication Date: 2017-06-20
- Inventor: Manabu Funato , Mitsuo Natsume , Mitsutoshi Ochiai
- Applicant: SINFONIA TECHNOLOGY CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2013-103767 20130516
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/673

Abstract:
A load port device comprises a link mechanism that has a main moving link whose one end is connected with a door holding member in a rotatable manner, a guide that bends and extends from a horizontal direction to a vertical direction and that guides one end of the main moving link, a main moving block with which the other end of the main moving link is connected in a rotatable manner and a door hoisting shaft that extends in the vertical direction and that moves the main moving block in the extending direction. The link mechanism allows the end of the main moving link to move from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction along the guide in a state that the other end of the main moving link moves to the vertical direction.
Public/Granted literature
- US20140338288A1 LOAD PORT DEVICE Public/Granted day:2014-11-20
Information query
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