- 专利标题: Adaptive electrical testing of wafers
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申请号: US14450027申请日: 2014-08-01
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公开(公告)号: US09689923B2公开(公告)日: 2017-06-27
- 发明人: Sagar A. Kekare
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corp.
- 当前专利权人: KLA-Tencor Corp.
- 当前专利权人地址: US CA Milpitas
- 代理商 Ann Marie Mewherter
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; G01R31/3185 ; H01L21/66
摘要:
A method and a system for determining one or more parameters for electrical testing of a wafer are provided. One method includes determining electrical test paths through a device being formed on a wafer and physical layout components in different layers of the device corresponding to each of the electrical test paths. The method also includes determining one or more parameters of electrical testing for the wafer based on one or more characteristics of the electrical test paths. In addition, the method includes acquiring information for one or more characteristics of a physical version of the wafer. The information is generated by performing an inline process on the physical version of the wafer. The method further includes altering at least one of the one or more parameters of the electrical testing for the wafer based on the acquired information.
公开/授权文献
- US20150039954A1 Adaptive Electrical Testing of Wafers 公开/授权日:2015-02-05
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