Invention Grant
- Patent Title: Magnetic field sensor
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Application No.: US14662891Application Date: 2015-03-19
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Publication No.: US09689933B2Publication Date: 2017-06-27
- Inventor: Kuei-Ann Wen , Tai-Wei Chiang
- Applicant: SAGATEK CO., LTD.
- Applicant Address: TW Taipei
- Assignee: Sagatek Co., Ltd.
- Current Assignee: Sagatek Co., Ltd.
- Current Assignee Address: TW Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW103132219A 20140918
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01R33/00 ; G01R33/02 ; G01R33/028 ; G01P15/135 ; G01P15/03

Abstract:
A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a power supply; wherein the mass block, the Y direction displacement sensors and the Z direction displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, a region corresponding to the Y direction displacement sensors and a region corresponding to the Z direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y direction displacement sensors include two electrodes, each comprising at least two metal layers connected by a via; the Z direction displacement sensor includes two electrodes, each comprising at least two metal layers connected by a via; and the power supply provides a current flowing through the mass block selectively in X or Y direction.
Public/Granted literature
- US20160084922A1 MAGNETIC FIELD SENSOR Public/Granted day:2016-03-24
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