公开(公告)号：US09689933B2

公开(公告)日：2017-06-27

申请号：US14662891

申请日：2015-03-19

Applicant: SAGATEK CO., LTD.

Inventor： Kuei-Ann Wen ,  Tai-Wei Chiang

IPC: G01R27/26 ,  G01R33/00 ,  G01R33/02 ,  G01R33/028 ,  G01P15/135 ,  G01P15/03

CPC classification number: G01R33/0286 ,  G01R33/0206

Abstract: A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a power supply; wherein the mass block, the Y direction displacement sensors and the Z direction displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, a region corresponding to the Y direction displacement sensors and a region corresponding to the Z direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y direction displacement sensors include two electrodes, each comprising at least two metal layers connected by a via; the Z direction displacement sensor includes two electrodes, each comprising at least two metal layers connected by a via; and the power supply provides a current flowing through the mass block selectively in X or Y direction.

公开(公告)号：US09696339B2

公开(公告)日：2017-07-04

申请号：US14724417

申请日：2015-05-28

Applicant: SAGATEK CO., LTD.

Inventor： Kuei-Ann Wen ,  Tai-Wei Chiang

IPC: G01P15/125 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/18

Abstract: A three-axis accelerometer to provide measurement of acceleration in three axes, comprising a substrate, a suspending mass block suspended in the substrate, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a group of X direction displacement sensors; wherein the Y direction displacement sensors, the Z direction displacement sensors and the X direction displacement sensors are respectively arranged adjacent to the mass block; the mass block and the displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, regions corresponding to the Y, Z and X direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y, Z and X groups displacement sensors respectively comprise at least two metal layers connected by a via.

公开(公告)号：US09664749B2

公开(公告)日：2017-05-30

申请号：US14662786

申请日：2015-03-19

Applicant: SAGATEK CO., LTD.

Inventor： Kuei-Ann Wen ,  Chia-Feng Chang

IPC: G01R33/02 ,  G01R33/028 ,  G01R33/038

CPC classification number: G01R33/028 ,  G01R33/0286 ,  G01R33/038

Abstract: Disclosed is a resonant magnetic field sensor, comprising a detector structure including a mass block and displacement detection electrodes; capacitance to voltage converter and amplifier to convert detection signals of the detection electrodes into voltage signals, as output signals of the magnetic field sensor; and a vibration driving circuit to provide the output signals to the mass block in the form of a current, to drive the mass block to vibrate. The vibration driving circuit may be a comparator.