Invention Grant
- Patent Title: Textured metallic back reflector
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Application No.: US12904047Application Date: 2010-10-13
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Publication No.: US09691921B2Publication Date: 2017-06-27
- Inventor: Harry Atwater , Brendan Kayes , Isik C. Kizilyalli , Hui Nie
- Applicant: Harry Atwater , Brendan Kayes , Isik C. Kizilyalli , Hui Nie
- Applicant Address: US CA Sunnyvale
- Assignee: ALTA DEVICES, INC.
- Current Assignee: ALTA DEVICES, INC.
- Current Assignee Address: US CA Sunnyvale
- Agency: Arent Fox LLP
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L21/00 ; H01L31/0232 ; H01L31/056 ; H01L31/0304 ; H01L31/0236 ; H01L31/18 ; H01L31/20 ; H01L31/0693

Abstract:
Embodiments of the invention generally relate to device fabrication of thin films used as solar devices or other electronic devices, and include textured back reflectors utilized in solar applications. In one embodiment, a method for forming a textured metallic back reflector which includes depositing a metallic layer on a gallium arsenide material within a thin film stack, forming an array of metallic islands from the metallic layer during an annealing process, removing or etching material from the gallium arsenide material to form apertures between the metallic islands, and depositing a metallic reflector layer to fill the apertures and cover the metallic islands. In another embodiment, a textured metallic back reflector includes an array of metallic islands disposed on a gallium arsenide material, a plurality of apertures disposed between the metallic islands and extending into the gallium arsenide material, a metallic reflector layer disposed over the metallic islands, and a plurality of reflector protrusions formed between the metallic islands and extending from the metallic reflector layer and into the apertures formed in the gallium arsenide material.
Public/Granted literature
- US20110083722A1 TEXTURED METALLIC BACK REFLECTOR Public/Granted day:2011-04-14
Information query
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