- 专利标题: Textured metallic back reflector
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申请号: US12904047申请日: 2010-10-13
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公开(公告)号: US09691921B2公开(公告)日: 2017-06-27
- 发明人: Harry Atwater , Brendan Kayes , Isik C. Kizilyalli , Hui Nie
- 申请人: Harry Atwater , Brendan Kayes , Isik C. Kizilyalli , Hui Nie
- 申请人地址: US CA Sunnyvale
- 专利权人: ALTA DEVICES, INC.
- 当前专利权人: ALTA DEVICES, INC.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Arent Fox LLP
- 主分类号: H01L31/00
- IPC分类号: H01L31/00 ; H01L21/00 ; H01L31/0232 ; H01L31/056 ; H01L31/0304 ; H01L31/0236 ; H01L31/18 ; H01L31/20 ; H01L31/0693
摘要:
Embodiments of the invention generally relate to device fabrication of thin films used as solar devices or other electronic devices, and include textured back reflectors utilized in solar applications. In one embodiment, a method for forming a textured metallic back reflector which includes depositing a metallic layer on a gallium arsenide material within a thin film stack, forming an array of metallic islands from the metallic layer during an annealing process, removing or etching material from the gallium arsenide material to form apertures between the metallic islands, and depositing a metallic reflector layer to fill the apertures and cover the metallic islands. In another embodiment, a textured metallic back reflector includes an array of metallic islands disposed on a gallium arsenide material, a plurality of apertures disposed between the metallic islands and extending into the gallium arsenide material, a metallic reflector layer disposed over the metallic islands, and a plurality of reflector protrusions formed between the metallic islands and extending from the metallic reflector layer and into the apertures formed in the gallium arsenide material.
公开/授权文献
- US20110083722A1 TEXTURED METALLIC BACK REFLECTOR 公开/授权日:2011-04-14
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