- 专利标题: Semiconductor device and dielectric film including a fluorite-type crystal
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申请号: US14843050申请日: 2015-09-02
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公开(公告)号: US09691973B2公开(公告)日: 2017-06-27
- 发明人: Tsunehiro Ino , Riichiro Takaishi , Koichi Kato , Yasushi Nakasaki , Takamitsu Ishihara , Daisuke Matsushita
- 申请人: Kabushiki Kaisha Toshiba
- 申请人地址: JP Minato-ku
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2013-197703 20130925
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; G11C11/22 ; H01L27/11507 ; H01L27/11514 ; H01L49/02 ; H01L27/1159 ; H01L27/11597 ; H01L29/78 ; C01G25/02 ; C01G27/00 ; C01G27/02 ; H01L29/51
摘要:
A semiconductor device according to an embodiment includes a first conductive layer, a second conductive layer, and a dielectric film provided between the first and the second conductive layers. The dielectric film including a fluorite-type crystal and a positive ion site includes Hf and/or Zr, and a negative ion site includes O. In the dielectric film, parameters a, b, c, p, x, y, z, u, v and w satisfy a predetermined relation. The axis length of the a-axis, b-axis and c-axis of the original unit cell is a, b, and c, respectively. An axis in a direction with no reversal symmetry is c-axis, a stacking direction of atomic planes of two kinds formed by negative ions disposed at different positions is a-axis, the remainder is b-axis. The parameters x, y, z, u, v and w are values represented using the parameter p.
公开/授权文献
- US20150380641A1 SEMICONDUCTOR DEVICE AND DIELECTRIC FILM 公开/授权日:2015-12-31
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