- 专利标题： Automatic lithium target regenerating apparatus and automatic lithium target regenerating method
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申请号： US14128371申请日： 2012-05-31
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公开(公告)号： US09695507B2公开(公告)日： 2017-07-04
- 发明人: Ryo Fujii , Masaru Nakamura , Yoshio Imahori , Masaharu Hoshi
- 申请人： Ryo Fujii , Masaru Nakamura , Yoshio Imahori , Masaharu Hoshi
- 申请人地址： JP Tokyo
- 专利权人： Cancer Intelligence Care Systems, Inc.
- 当前专利权人： Cancer Intelligence Care Systems, Inc.
- 当前专利权人地址： JP Tokyo
- 代理机构： Harness, Dickey & Pierce, PLC
- 优先权： JP2011-141879 20110627
- 国际申请： PCT/JP2012/064047 WO 20120531
- 国际公布： WO2013/001974 WO 20130103
- 主分类号： C23C16/14
- IPC分类号： C23C16/14 ; C23C16/06 ; H05H6/00 ; C23C14/14
摘要：
Provided are an automatic lithium target regenerating apparatus and an automatic lithium target regenerating method, which are equipped with a measurement function of a lithium film thickness of a lithium target, and may automatically regenerate the consumed lithium target by moving a vapor deposition source to the lithium target. An automatic lithium target regenerating apparatus (106) is allowed to automatically regenerate lithium of a lithium target. The automatic lithium target regenerating apparatus (106) includes a lithium vapor deposition unit (1) for vapor-depositing the lithium on the lithium target. The lithium vapor deposition unit (1) is allowed to vapor-deposit the lithium on the lithium target by moving to the lithium target side.
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