Invention Grant
- Patent Title: Multi-substrate thermal management apparatus
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Application No.: US14504021Application Date: 2014-10-01
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Publication No.: US09696097B2Publication Date: 2017-07-04
- Inventor: Kallol Bera , Kim Vellore , Andrew Constant , Jacob Newman , Jeffrey Blahnik , Jason Schaller , William Weaver , Robert Vopat , Benjamin Riordon
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: E21B27/00
- IPC: E21B27/00 ; F28F3/12 ; H01L21/67 ; H01L21/673

Abstract:
Embodiments of multi-substrate thermal management apparatus are provided herein. In some embodiments, a multi-substrate thermal management apparatus includes a plurality of plates vertically arranged above one another; a plurality of channels extending through each of the plurality of plates; a supply manifold including a supply channel coupled to the plurality of plates at first locations; and a return manifold including a return channel coupled to the plurality of plates via a plurality of legs at second locations, wherein the supply and return channels are fluidly coupled to the plurality of channels to flow a heat transfer fluid through the plurality of plates.
Public/Granted literature
- US20160033205A1 MULTI-SUBSTRATE THERMAL MANAGEMENT APPARATUS Public/Granted day:2016-02-04
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