Invention Grant
- Patent Title: Methods, apparatus and system for screening process splits for technology development
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Application No.: US14288278Application Date: 2014-05-27
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Publication No.: US09702926B2Publication Date: 2017-07-11
- Inventor: Suresh Uppal , Andreas Kerber , William McMahon
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan, P.C.
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/12

Abstract:
At least one method and system disclosed herein involves performing a time-dependent dielectric breakdown (TDDB) test and a bias temperature instability (BTI) test on a device. A device having at least one transistor and at least one dielectric layer is provided. A test signal is provided for performing a TDDB test and a BTI test on the device. The TDDB test and the BTI test are performed substantially simultaneously on the device based upon the test signal. The data relating to a breakdown of the dielectric layer and at least one characteristic of the transistor based upon the TDDB test and the BTI test is acquired, stored, and/or transmitted.
Public/Granted literature
- US20150346271A1 METHODS, APPARATUS AND SYSTEM FOR SCREENING PROCESS SPLITS FOR TECHNOLOGY DEVELOPMENT Public/Granted day:2015-12-03
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