Invention Grant
- Patent Title: Nonvolatile memory devices and methods of forming same
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Application No.: US15252931Application Date: 2016-08-31
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Publication No.: US09704878B2Publication Date: 2017-07-11
- Inventor: Woong-Seop Lee , Seokcheon Baek , Jinhyun Shin
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0164177 20151123
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/11582 ; H01L27/11556

Abstract:
A vertical NAND-type memory device includes a vertical stack of inter-gate insulating layers and gate electrodes arranged in an alternating sequence on an underlying substrate, which includes a cell array region and a contact region therein. At least one NAND-type channel structure is provided, which extends vertically through the vertical stack of inter-gate insulating layers and gate electrodes. An end sidewall of a first of the gate electrodes, which extends laterally over at least a portion of the contact region, has a vertical slope that is less steep than vertical slopes of end sidewalls of a first plurality of the gate electrodes extending between the first of the gate electrodes and the substrate.
Public/Granted literature
- US20170103996A1 NONVOLATILE MEMORY DEVICES AND METHODS OF FORMING SAME Public/Granted day:2017-04-13
Information query
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