Invention Grant
- Patent Title: Lateral double diffused metal oxide semiconductor device and manufacturing method thereof
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Application No.: US15225559Application Date: 2016-08-01
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Publication No.: US09704987B2Publication Date: 2017-07-11
- Inventor: Tsung-Yi Huang
- Applicant: RICHTEK TECHNOLOGY CORPORATION
- Applicant Address: TW Zhubei, Hsinchu
- Assignee: RICHTEK TECHNOLOGY CORPORATION
- Current Assignee: RICHTEK TECHNOLOGY CORPORATION
- Current Assignee Address: TW Zhubei, Hsinchu
- Agency: Tung & Associates
- Priority: TW104126785A 20150818
- Main IPC: H01L21/04
- IPC: H01L21/04 ; H01L29/78 ; H01L29/10 ; H01L21/762 ; H01L29/08 ; H01L29/36 ; H01L29/45 ; H01L29/417 ; H01L29/66 ; H01L29/06

Abstract:
A lateral double diffused metal oxide semiconductor device, includes: a P-type substrate, an epitaxial layer, a P-type high voltage well, a P-type body region, an N-type well, an isolation oxide region, a drift oxide region, a gate, an N-type contact region, a P-type contact region, a top source, a bottom source, and an N-type drain. The P-type body region is between and connects the P-type high voltage well and the surface of the epitaxial layer. The P-type body region includes a peak concentration region, which is beneath and in direct contact the surface of the epitaxial layer, wherein the peak concentration region has a highest P-type impurity concentration in the P-type body region. The P-type impurity concentration of the P-type body region is higher than a predetermined threshold to suppress a parasitic bipolar transistor such that it does not turn ON.
Public/Granted literature
- US20170054019A1 LATERAL DOUBLE DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-02-23
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