Invention Grant
- Patent Title: Waveguide structure and manufacturing method thereof
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Application No.: US14602290Application Date: 2015-01-22
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Publication No.: US09705173B2Publication Date: 2017-07-11
- Inventor: Tzung-Lin Li , Chien-Yi Lee , Chieh-Pin Chang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW104100327A 20150106
- Main IPC: H01P3/02
- IPC: H01P3/02 ; H01P3/00 ; H01P11/00 ; H01P7/08

Abstract:
A waveguide structure includes a signal line and two static lines. The signal line is disposed between the static lines in a first direction. The static lines and the signal line are disposed parallel to one another. Each static line includes a first conductive pattern, a second conductive pattern, and a third conductive pattern. The first conductive pattern and the signal line are disposed on an identical plane of a dielectric layer. A thickness of the first conductive pattern is substantially equal to a thickness of the signal line. The second conductive pattern is disposed on the first conductive pattern. A width of the first conductive pattern is larger than a width of the second conductive pattern in the first direction. The third conductive pattern is disposed on the second conductive pattern. A width of the third conductive pattern is larger than the width of the second conductive pattern.
Public/Granted literature
- US20160197391A1 WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-07-07
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