Frontside coupled waveguide with backside optical connection using a curved spacer
Abstract:
A method of manufacturing a device includes forming an optical coupler having a first end contacting a front side of a semiconductor substrate and a second end contacting an optical waveguide on an insulator layer on the substrate. The optical coupler is curved between the first end and the second end. The optical coupler is configured to change a direction of travel of light from a first direction at the first end to a second direction at the second end.
Public/Granted literature
Information query
Patent Agency Ranking
0/0