- 专利标题： Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including side-to-side short configured fill cells, and the second DOE including tip-to-side short configured fill cells
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申请号： US15473542申请日： 2017-03-29
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公开(公告)号： US09711496B1公开(公告)日： 2017-07-18
- 发明人: Stephen Lam , Dennis Ciplickas , Tomasz Brozek , Jeremy Cheng , Simone Comensoli , Indranil De , Kelvin Doong , Hans Eisenmann , Timothy Fiscus , Jonathan Haigh , Christopher Hess , John Kibarian , Sherry Lee , Marci Liao , Sheng-Che Lin , Hideki Matsuhashi , Kimon Michaels , Conor O'Sullivan , Markus Rauscher , Vyacheslav Rovner , Andrzej Strojwas , Marcin Strojwas , Carl Taylor , Rakesh Vallishayee , Larg Weiland , Nobuharu Yokoyama
- 申请人： PDF Solutions, Inc.
- 申请人地址： US CA San Jose
- 专利权人： PDF Solutions, Inc.
- 当前专利权人： PDF Solutions, Inc.
- 当前专利权人地址： US CA San Jose
- 代理商 David Garrod
- 主分类号： H01L29/00
- IPC分类号： H01L29/00 ; H01L27/02 ; H01L29/45 ; H01L23/522 ; H01L23/528 ; H01L21/66 ; H01L21/8234 ; H01L27/088 ; G06F17/50 ; H01L29/06 ; G06F11/07
摘要：
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of side-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of tip-to-side shorts.
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