Invention Grant
- Patent Title: Deposition apparatus and deposition method using the same
-
Application No.: US14664672Application Date: 2015-03-20
-
Publication No.: US09713818B2Publication Date: 2017-07-25
- Inventor: Jeongwon Han
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2014-0135961 20141008
- Main IPC: H05K3/14
- IPC: H05K3/14 ; B05B13/02 ; B05B5/08 ; B05B15/04 ; B05B15/12

Abstract:
A deposition apparatus and a deposition method are disclosed. In one aspect, the deposition apparatus includes an electrostatic chuck and a tensile plate attached to and formed over the electrostatic chuck. The deposition apparatus further includes an elevation unit configured to move the tensile plate towards the substrate and a tensile unit configured to apply a tensile force to the tensile plate to expand the tensile plate.
Public/Granted literature
- US20160105971A1 DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME Public/Granted day:2016-04-14
Information query