Invention Grant
- Patent Title: Context-based inspection for dark field inspection
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Application No.: US14563845Application Date: 2014-12-08
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Publication No.: US09715725B2Publication Date: 2017-07-25
- Inventor: Yong Zhang , Tao Luo , Chaohong Wu , Stephanie Chen , Lisheng Gao
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06K9/46
- IPC: G06K9/46 ; G06T7/00 ; G06T7/33

Abstract:
Methods and systems for detecting defects on a wafer are provided. One method includes altering one or more design clips based on how the one or more design clips will appear in output generated by a wafer inspection process for a wafer. The method also includes aligning the one or more altered design clips to the output generated for the wafer during the wafer inspection process. In addition, the method includes detecting defects on the wafer based on the output aligned to the one or more altered design clips.
Public/Granted literature
- US20150178907A1 Context-Based Inspection for Dark Field Inspection Public/Granted day:2015-06-25
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