Invention Grant
- Patent Title: Programmable deposition of thin films of a user-defined profile with nanometer scale accuracy
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Application No.: US15207788Application Date: 2016-07-12
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Publication No.: US09718096B2Publication Date: 2017-08-01
- Inventor: Sidlgata V. Sreenivasan , Shrawan Singhal , Ovadia Abed , Lawrence Dunn
- Applicant: Board of Regents, The University of Texas System
- Applicant Address: US TX Austin
- Assignee: Board of Regents, The University of Texas System
- Current Assignee: Board of Regents, The University of Texas System
- Current Assignee Address: US TX Austin
- Agency: Winstead, P.C.
- Agent Robert A. Voigt, Jr.
- Main IPC: B05D3/12
- IPC: B05D3/12 ; B05D1/02 ; B05D3/06 ; G02B1/111 ; G02B5/28 ; B05D5/00 ; B05D3/00 ; G03F7/00 ; B05D1/40 ; B05D1/42 ; B81C1/00 ; H01L21/027 ; B05D3/04 ; B05D3/02 ; B82Y40/00

Abstract:
An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate is held in a roll-to-roll configuration such that a first contact of the drops is made by a front side of the superstrate thereby initiating a liquid front that spreads outward merging with the drops to form a contiguous film captured between the substrate and the superstrate. A non-equilibrium transient state of the superstrate, the contiguous film and the substrate then occurs after a duration of time. The contiguous film is then cured to crosslink it into a polymer. The superstrate is then separated from the polymer thereby leaving a polymer film on the substrate. In such a manner, non-uniform films can be formed without significant material wastage in an inexpensive manner.
Public/Granted literature
- US20160318066A1 PROGRAMMABLE DEPOSITION OF THIN FILMS OF A USER-DEFINED PROFILE WITH NANOMETER SCALE ACCURACY Public/Granted day:2016-11-03
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