Invention Grant
- Patent Title: Method and device for characterizing an electron beam
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Application No.: US14973230Application Date: 2015-12-17
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Publication No.: US09721755B2Publication Date: 2017-08-01
- Inventor: Tomas Lock
- Applicant: Arcam AB
- Applicant Address: SE Moelndal
- Assignee: Arcam AB
- Current Assignee: Arcam AB
- Current Assignee Address: SE Moelndal
- Agency: Alston & Bird LLP
- Main IPC: G01N23/00
- IPC: G01N23/00 ; H01J37/304 ; H01J37/305 ; H01J37/244 ; H01J37/30 ; H01J37/317 ; B23K15/00 ; B29C67/00 ; G01T1/29 ; B33Y50/02 ; B33Y10/00 ; B33Y40/00 ; B23K15/02 ; B28B1/00 ; B28B17/00 ; B22F3/105 ; B33Y30/00

Abstract:
A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.
Public/Granted literature
- US20160211116A1 METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM Public/Granted day:2016-07-21
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