Invention Grant
- Patent Title: Low cost hermetic micro-electronics
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Application No.: US14984227Application Date: 2015-12-30
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Publication No.: US09721864B2Publication Date: 2017-08-01
- Inventor: Bing Dang , John U. Knickerbocker , Minhua Lu , Jae-Woong Nah , Robert John Polastre
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Gibbons Gutman Bongini Bianco PL
- Agent Donna Flores
- Main IPC: H01L23/15
- IPC: H01L23/15 ; H01L23/31 ; H01L21/786

Abstract:
A hermetically sealed electronic device and method of fabrication are provided. A base layer of a wafer is created using a substrate formed from ultra-thin glass or ceramic using panel or roll to roll processing. One or more layers are bonded to the base layer. The wafer is singulated into a plurality of electronic devices having a top surface and a plurality of sides. A hermetic sealant is applied to each electronic device to completely encase the top surface and the sides while bonding to the base layer. At least one of the layers is a metallization layer formed by metal deposition. Full metallization may be applied over the entire wafer and a pattern subsequently transferred to the full metallization by one of laser and chemical etching. The electronic device may further include at least one electronic component attached to one of the layers and encased by the hermetic sealant.
Public/Granted literature
- US20170194225A1 LOW COST HERMETIC MICRO-ELECTRONICS Public/Granted day:2017-07-06
Information query
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