Invention Grant
- Patent Title: Nonvolatile memory device and method of manufacturing the same
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Application No.: US15138873Application Date: 2016-04-26
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Publication No.: US09721967B2Publication Date: 2017-08-01
- Inventor: Sunwoo Lee , Sangwoo Lee , Changwon Lee , Jeonggil Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2009-0012495 20090216
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11582 ; H01L21/28 ; H01L27/11578 ; H01L29/49 ; H01L23/535 ; H01L27/1157

Abstract:
A nonvolatile memory device includes gate electrodes three dimensionally arranged on a semiconductor substrate, a semiconductor pattern extending from the semiconductor substrate and crossing sidewalls of the gate electrodes, a metal liner pattern formed between the semiconductor pattern and formed on a top surface and a bottom surface of each of the gate electrodes, and a charge storage layer formed between the semiconductor pattern and the metal liner pattern.
Public/Granted literature
- US20160240553A1 NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-08-18
Information query
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