Invention Grant
- Patent Title: Local buried channel dielectric for vertical NAND performance enhancement and vertical scaling
-
Application No.: US14884210Application Date: 2015-10-15
-
Publication No.: US09722074B2Publication Date: 2017-08-01
- Inventor: Randy J. Koval , Fatma A. Simsek-Ege
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Compass IP Law PC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/788 ; H01L29/792 ; H01L27/11556 ; H01L27/11582 ; H01L27/11524 ; H01L27/1157

Abstract:
A non-volatile memory device and a method for forming the non-volatile memory device are disclosed. The memory device utilizes a local buried channel dielectric in a NAND string that reduces bulk channel leakage at the edge of the NAND string where the electric field gradient along the direction of the string pillar is at or near a maximum during programming operations. The memory device comprises a channel that is coupled at one end to a bitline and at the other end to a source. A select gate is formed at the end of the channel coupled to the bitline to selectively control conduction between the bitline and the channel. At least one non-volatile memory cell is formed along the length of the channel between the select gate and the second end of the channel. A local dielectric region is formed within the channel at the first end of the channel.
Public/Granted literature
- US20160190313A1 LOCAL BURIED CHANNEL DIELECTRIC FOR VERTICAL NAND PERFORMANCE ENHANCEMENT AND VERTICAL SCALING Public/Granted day:2016-06-30
Information query
IPC分类: