发明授权
- 专利标题: Lamella creation method and device using fixed-angle beam and rotating sample stage
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申请号: US13493735申请日: 2012-06-11
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公开(公告)号: US09733164B2公开(公告)日: 2017-08-15
- 发明人: Andrew B. Wells , N. William Parker , Clive D. Chandler , Mark W. Utlaut
- 申请人: Andrew B. Wells , N. William Parker , Clive D. Chandler , Mark W. Utlaut
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Scheinberg & Associates, P.C.
- 代理商 John B. Kelly; John E. Hillert
- 主分类号: H01J37/26
- IPC分类号: H01J37/26 ; H01J37/20 ; G01N1/32 ; H01J37/302 ; H01J37/305
摘要:
A system for creating a substantially planar face in a substrate, the system including directing one or more beams at a first surface of a substrate to remove material from a first location, the beam being offset from a normal to the first surface by a curtaining angle; sweeping the one or more beams in a plane that is perpendicular to the first surface to mill one or more initial cuts, the initial cuts exposing a second surface that is substantially perpendicular to the first surface; rotating the substrate about an axis other than an axis normal to the first beam or parallel to the first beam; directing the first beam at the second surface to remove additional material from the substrate without changing the curtaining angle; and scanning the one or more beams in across the second surface to mill one or more finishing cuts.
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