专利检索 ap:"Clive D. Chandler" 第 1 页

1.

发明授权
High selectivity, low damage electron-beam delineation etch 有权
标题翻译：高选择性，低损伤电子束描绘蚀刻

公开(公告)号：US08778804B2

公开(公告)日：2014-07-15

申请号：US12363376

申请日：2009-01-30

申请人： Steven Randolph , Clive D. Chandler

发明人： Steven Randolph , Clive D. Chandler

IPC分类号： H01L21/311 , H01L21/302 , H01L21/306 , H01L21/3065

CPC分类号： H01L21/306 , H01L21/3065 , H01L21/31116 , H01L21/32137

摘要： A method and apparatus for selective etching a substrate using a focused beam. For example, multiple gases may be used that are involved in competing beam-induced and spontaneous reactions, with the result depending on the materials on the substrate. The gases may include, for example, an etchant gas and an auxiliary gas that inhibits etching.

摘要翻译： 一种使用聚焦光束选择性蚀刻衬底的方法和装置。例如，可以使用涉及光束诱导和自发反应的多种气体，结果取决于衬底上的材料。气体可以包括例如蚀刻剂气体和抑制蚀刻的辅助气体。

2.

发明授权
Localized plasma processing 有权
标题翻译：局部等离子体处理

公开(公告)号：US08530006B2

公开(公告)日：2013-09-10

申请号：US12877002

申请日：2010-09-07

申请人： Clive D. Chandler , Noel Smith

发明人： Clive D. Chandler , Noel Smith

IPC分类号： C23C16/455 , C23C16/48 , C23C16/503 , C23C16/505 , C23C16/507 , C23C16/513 , C23C8/00 , H01L21/306 , C23F1/00 , C23C16/06 , C23C16/22

CPC分类号： H01J37/32366 , B81C1/00531 , C23C16/047 , C23C16/345 , C23C16/401 , C23F4/00 , H01J37/32357

摘要： A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma and reactive gas impacts and processes the work piece. Because the plasma and the ions in the reactive gas can have low kinetic energy, there can be little or no surface damage. This is particularly useful for deposition processes. When it is desired to etch material, the reactive ions can be more energetic to enhance etching.

摘要翻译： 与带电粒子束沉积和蚀刻相比，局部等离子体处理的方法提高了处理速度并减少了工件损伤。在一个实施例中，等离子体射流离开等离子体产生室并激活反应气体。等离子体和反应气体射流冲击和处理工件。因为反应气体中的等离子体和离子可以具有低的动能，所以可能很少或没有表面损伤。这对于沉积工艺特别有用。当需要蚀刻材料时，反应离子可以更有活力以增强蚀刻。

3.

发明授权
Forming conductive features of electronic devices 失效
标题翻译：形成电子设备的导电特性

公开(公告)号：US08333820B2

公开(公告)日：2012-12-18

申请号：US13040087

申请日：2011-03-03

申请人： Mark J. Hampden-Smith , Toivo T. Kodas , Quint H. Powell , Daniel J. Skamser , James Caruso , Clive D. Chandler

发明人： Mark J. Hampden-Smith , Toivo T. Kodas , Quint H. Powell , Daniel J. Skamser , James Caruso , Clive D. Chandler

IPC分类号： B22F9/12

CPC分类号： B01J2/003 , B01J2/006 , B01J2/02 , B01J2/04 , B01J13/02 , B01J19/10 , B01J19/2405 , B01J2219/00112 , B01J2219/00155 , B01J2219/00159 , B01J2219/00162 , B01J2219/00166 , B01J2219/00171 , B01J2219/00186 , B22F1/0018 , B22F1/02 , B22F1/025 , B22F9/02 , B22F9/026 , B22F9/24 , B22F9/30 , B22F2998/00 , B22F2999/00 , B24B37/044 , B82Y30/00 , C01B13/18 , C01B13/185 , C01B17/20 , C01G15/006 , C01G23/003 , C01G23/006 , C01G25/00 , C01P2002/60 , C01P2002/70 , C01P2004/03 , C01P2004/32 , C01P2004/34 , C01P2004/50 , C01P2004/52 , C01P2004/61 , C01P2004/62 , C01P2004/80 , C01P2006/10 , C01P2006/22 , C01P2006/60 , C01P2006/80 , C09G1/02 , C09K3/1436 , C09K3/1463 , C09K11/025 , C09K11/0805 , C09K11/0877 , C09K11/562 , C09K11/565 , C09K11/567 , C09K11/584 , C09K11/595 , C09K11/623 , C09K11/625 , C09K11/642 , C09K11/643 , C09K11/644 , C09K11/662 , C09K11/666 , C09K11/671 , C09K11/672 , C09K11/7701 , C09K11/7708 , C09K11/7718 , C09K11/7729 , C09K11/7731 , C09K11/7734 , C09K11/7746 , C09K11/7769 , C09K11/7771 , C09K11/7774 , C09K11/7776 , C09K11/7784 , C09K11/7786 , C09K11/7787 , C09K11/7789 , C09K11/7797 , C22C1/1026 , C22C32/0089 , H01G4/0085 , H01J29/20 , H01L21/3212 , H01L23/49883 , H01L2924/0002 , H01L2924/09701 , Y10T428/12007 , Y10T428/12014 , Y10T428/12056 , Y10T428/1216 , Y10T428/12181 , Y10T428/256 , Y10T428/2982 , Y10T428/2991 , B22F1/0014 , B22F1/0048 , B22F2202/01 , B22F3/008 , B22F2202/11 , H01L2924/00

摘要： Provided is an aerosol method, and accompanying apparatus, for preparing powdered products of a variety of materials involving the use of an ultrasonic aerosol generator including a plurality of ultrasonic transducers underlying and ultrasonically energizing a reservoir of liquid feed which forms droplets of the aerosol. Carrier gas is delivered to different portions of the reservoir by a plurality of gas delivery ports delivering gas from a gas delivery system. The aerosol is pyrolyzed to form particles, which are then cooled and collected. The invention also provides powders made by the method and devices made using the powders.

摘要翻译： 本发明提供了一种用于制备各种材料的粉末产品的气溶胶方法和配套装置，其涉及使用包括多个超声换能器的超声波气溶胶发生器，所述超声波气溶胶发生器基本上超声波地激励形成液滴的液体进料的储存器。载气通过从气体输送系统输送气体的多个气体输送口输送到储存器的不同部分。气溶胶被热解形成颗粒，然后将其冷却并收集。本发明还提供通过使用粉末制造的方法和装置制成的粉末。

4.

发明申请
Localized Plasma Processing 有权
标题翻译：本地等离子体处理

公开(公告)号：US20110117748A1

公开(公告)日：2011-05-19

申请号：US12877002

申请日：2010-09-07

申请人： Clive D. Chandler , Noel Smith

发明人： Clive D. Chandler , Noel Smith

IPC分类号： H01L21/3065

CPC分类号： H01J37/32366 , B81C1/00531 , C23C16/047 , C23C16/345 , C23C16/401 , C23F4/00 , H01J37/32357

摘要： A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma and reactive gas impacts and processes the work piece. Because the plasma and the ions in the reactive gas can have low kinetic energy, there can be little or no surface damage. This is particularly useful for deposition processes. When it is desired to etch material, the reactive ions can be more energetic to enhance etching.

摘要翻译： 与带电粒子束沉积和蚀刻相比，局部等离子体处理的方法提高了处理速度并减少了工件损伤。在一个实施例中，等离子体射流离开等离子体产生室并激活反应气体。等离子体和反应气体射流冲击和处理工件。因为反应气体中的等离子体和离子可以具有低的动能，所以可能很少或没有表面损伤。这对于沉积工艺特别有用。当需要蚀刻材料时，反应离子可以更有活力以增强蚀刻。

5.

发明申请
COATED NICKEL-CONTAINING POWDERS 失效
标题翻译：包衣的含镍粉末

公开(公告)号：US20080233422A1

公开(公告)日：2008-09-25

申请号：US12134006

申请日：2008-06-05

申请人： Toivo T. Kodas , Mark J. Hampden-Smith , James Caruso , Quint H. Powell , Clive D. Chandler , Daniel J. Skamser

发明人： Toivo T. Kodas , Mark J. Hampden-Smith , James Caruso , Quint H. Powell , Clive D. Chandler , Daniel J. Skamser

IPC分类号： B32B5/16

CPC分类号： B01J2/003 , B01J2/006 , B01J2/02 , B01J2/04 , B22F1/0014 , B22F1/0018 , B22F1/02 , B22F1/025 , B22F9/02 , B22F9/026 , B22F9/24 , B22F9/26 , B22F9/30 , B22F2998/00 , B22F2999/00 , B24B37/044 , B82Y30/00 , C01B13/185 , C01B17/20 , C01G15/006 , C01G23/003 , C01G23/006 , C01G25/00 , C01P2002/60 , C01P2002/70 , C01P2004/03 , C01P2004/32 , C01P2004/34 , C01P2004/50 , C01P2004/52 , C01P2004/61 , C01P2004/62 , C01P2004/80 , C01P2006/10 , C01P2006/60 , C01P2006/80 , C09G1/02 , C09K3/1436 , C09K3/1463 , C09K11/025 , C09K11/0805 , C09K11/0877 , C09K11/562 , C09K11/565 , C09K11/567 , C09K11/595 , C09K11/625 , C09K11/671 , C09K11/7718 , C09K11/7731 , C09K11/7734 , C09K11/7746 , C09K11/7771 , C09K11/7774 , C09K11/7789 , C09K11/7797 , C22C1/1026 , C22C29/12 , C22C32/0089 , H01G4/008 , H01G4/0085 , H01G4/12 , H01G4/30 , H01J29/20 , H01L21/3212 , H01L23/49883 , H01L31/022425 , H01L2224/29339 , H01L2224/8384 , H01L2924/01019 , H01L2924/01079 , H01L2924/01327 , H01L2924/09701 , H01L2924/12044 , H01L2924/203 , H01M4/02 , H01M4/0421 , H01M4/366 , H01M4/38 , H01M14/005 , H01M2004/021 , H05K1/092 , Y02E10/50 , Y02P10/32 , Y10T428/12181 , Y10T428/29 , Y10T428/2982 , Y10T428/2991 , Y10T428/2993 , Y10T428/2998 , Y10T428/31678 , B22F1/0048 , B22F2202/01 , B22F3/008 , B22F2202/11 , H01L2924/00 , H01L2924/0002

摘要： Nickel powder batches and methods for producing nickel powder batches. The powder batches include particles having a small particle size, narrow size distribution and a spherical morphology. The present invention is also directed to devices incorporating the nickel metal powders.

摘要翻译： 镍粉批号及生产镍粉批次的方法。粉末批料包括具有小粒度，窄尺寸分布和球形形态的颗粒。本发明还涉及包含镍金属粉末的装置。

6.

发明授权
Coated nickel-containing powders, methods and apparatus for producing such powders and devices fabricated from same 有权
标题翻译：涂覆的含镍粉末，用于制造这种粉末的方法和装置以及由其制造的装置

公开(公告)号：US07384447B2

公开(公告)日：2008-06-10

申请号：US10904254

申请日：2004-11-01

申请人： Toivo T. Kodas , Mark J. Hampden-Smith , James Caruso , Quint H. Powell , Clive D. Chandler , Daniel J. Skamser

发明人： Toivo T. Kodas , Mark J. Hampden-Smith , James Caruso , Quint H. Powell , Clive D. Chandler , Daniel J. Skamser

IPC分类号： B22F1/02

CPC分类号： B01J2/003 , B01J2/006 , B01J2/02 , B01J2/04 , B22F1/0014 , B22F1/0018 , B22F1/02 , B22F1/025 , B22F9/02 , B22F9/026 , B22F9/24 , B22F9/26 , B22F9/30 , B22F2998/00 , B22F2999/00 , B24B37/044 , B82Y30/00 , C01B13/185 , C01B17/20 , C01G15/006 , C01G23/003 , C01G23/006 , C01G25/00 , C01P2002/60 , C01P2002/70 , C01P2004/03 , C01P2004/32 , C01P2004/34 , C01P2004/50 , C01P2004/52 , C01P2004/61 , C01P2004/62 , C01P2004/80 , C01P2006/10 , C01P2006/60 , C01P2006/80 , C09G1/02 , C09K3/1436 , C09K3/1463 , C09K11/025 , C09K11/0805 , C09K11/0877 , C09K11/562 , C09K11/565 , C09K11/567 , C09K11/595 , C09K11/625 , C09K11/671 , C09K11/7718 , C09K11/7731 , C09K11/7734 , C09K11/7746 , C09K11/7771 , C09K11/7774 , C09K11/7789 , C09K11/7797 , C22C1/1026 , C22C29/12 , C22C32/0089 , H01G4/008 , H01G4/0085 , H01G4/12 , H01G4/30 , H01J29/20 , H01L21/3212 , H01L23/49883 , H01L31/022425 , H01L2224/29339 , H01L2224/8384 , H01L2924/01019 , H01L2924/01079 , H01L2924/01327 , H01L2924/09701 , H01L2924/12044 , H01L2924/203 , H01M4/02 , H01M4/0421 , H01M4/366 , H01M4/38 , H01M14/005 , H01M2004/021 , H05K1/092 , Y02E10/50 , Y02P10/32 , Y10T428/12181 , Y10T428/29 , Y10T428/2982 , Y10T428/2991 , Y10T428/2993 , Y10T428/2998 , Y10T428/31678 , B22F1/0048 , B22F2202/01 , B22F3/008 , B22F2202/11 , H01L2924/00 , H01L2924/0002

摘要： Nickel powder batches including coated nickel-containing particles and methods for producing the same. The coated nickel-containing particles having have a small particle size, narrow size distribution and a spherical morphology. The present invention is also directed to devices incorporating the coated nickel-containing particles.

摘要翻译： 镍粉批料，包括涂覆的含镍颗粒及其制备方法。涂覆的含镍颗粒具有小的粒度，窄的分布和球形的形态。本发明还涉及包含涂覆的含镍颗粒的装置。

7.

发明授权
Gold powders, methods for producing powders and devices fabricated from same 失效
标题翻译：金粉末，粉末制造方法和由其制造的装置

公开(公告)号：US07077882B2

公开(公告)日：2006-07-18

申请号：US10893715

申请日：2004-07-16

申请人： Toivo T. Kodas , Mark J. Hampden-Smith , James Caruso , Daniel J. Skamser , Quint H. Powell , Clive D. Chandler

发明人： Toivo T. Kodas , Mark J. Hampden-Smith , James Caruso , Daniel J. Skamser , Quint H. Powell , Clive D. Chandler

IPC分类号： B22F1/02

CPC分类号： H01G4/0085 , B01J2/003 , B01J2/006 , B01J2/02 , B01J2/04 , B22F1/0018 , B22F1/02 , B22F1/025 , B22F9/02 , B22F9/026 , B22F9/24 , B22F2998/00 , B22F2999/00 , B24B37/044 , B82Y30/00 , C01B13/185 , C01B17/20 , C01G15/006 , C01G23/003 , C01G23/006 , C01G25/00 , C01P2002/60 , C01P2002/70 , C01P2004/03 , C01P2004/32 , C01P2004/34 , C01P2004/50 , C01P2004/52 , C01P2004/61 , C01P2004/62 , C01P2004/80 , C01P2006/10 , C01P2006/60 , C01P2006/80 , C09G1/02 , C22C1/1026 , C22C32/0021 , C22C32/0089 , H01B1/22 , H01J29/20 , H01L21/3212 , H01L23/49883 , H01L2224/16225 , H01L2224/32225 , H01L2224/73204 , H01L2924/00014 , H01L2924/12044 , H01L2924/15192 , H05K1/092 , Y10T428/12028 , Y10T428/12049 , Y10T428/12056 , Y10T428/12181 , B22F1/0014 , B22F1/0048 , B22F2202/01 , B22F3/008 , B22F2202/11 , H01L2924/00 , H01L2224/0401

摘要： Gold powders and methods for producing gold powders. The powders preferably have a small particle size, narrow size distribution and a spherical morphology. The method includes forming the particles by a spray pyrolysis technique. The invention also includes novel devices and products formed from the gold powders.

摘要翻译： 金粉和生产金粉的方法。粉末优选具有小的粒度，窄的粒度分布和球形的形态。该方法包括通过喷雾热解技术形成颗粒。本发明还包括由金粉形成的新型装置和产品。

8.

发明授权
Palladium-containing particles, method and apparatus of manufacture, palladium-containing devices made therefrom 有权
标题翻译：含钯颗粒，制造方法和装置，由其制成的含钯装置

公开(公告)号：US06699304B1

公开(公告)日：2004-03-02

申请号：US09668441

申请日：2000-09-22

申请人： Mark J. Hampden-Smith , Toivo T. Kodas , Quint H. Powell , Daniel J. Skamser , James Caruso , Clive D. Chandler

发明人： Mark J. Hampden-Smith , Toivo T. Kodas , Quint H. Powell , Daniel J. Skamser , James Caruso , Clive D. Chandler

IPC分类号： B22F912

CPC分类号： H01G4/0085 , B01J2/003 , B01J2/006 , B01J2/02 , B01J2/04 , B22F1/0018 , B22F1/02 , B22F1/025 , B22F9/02 , B22F9/026 , B22F9/24 , B22F9/30 , B22F2998/00 , B22F2999/00 , B24B37/044 , B82Y30/00 , C01B13/185 , C01B17/20 , C01G15/006 , C01G23/003 , C01G23/006 , C01G25/00 , C01P2002/60 , C01P2002/70 , C01P2004/03 , C01P2004/32 , C01P2004/34 , C01P2004/50 , C01P2004/52 , C01P2004/61 , C01P2004/62 , C01P2004/80 , C01P2006/10 , C01P2006/60 , C01P2006/80 , C09G1/02 , C09K3/1436 , C09K3/1463 , C09K11/025 , C09K11/0805 , C09K11/0877 , C09K11/562 , C09K11/565 , C09K11/567 , C09K11/595 , C09K11/625 , C09K11/671 , C09K11/7718 , C09K11/7731 , C09K11/7734 , C09K11/7746 , C09K11/7771 , C09K11/7774 , C09K11/7789 , C09K11/7797 , C22C1/1026 , C22C32/0089 , H01G4/30 , H01J29/20 , H01L21/3212 , H01L23/49883 , H01L2924/0002 , H01L2924/09701 , Y10T428/12063 , B22F1/0014 , B22F1/0048 , B22F3/008 , B22F2202/11 , B22F2202/01 , B22F2201/02 , H01L2924/00

摘要： Provided are palladium-containing powders and a method and apparatus for manufacturing the palladium-containing particles of high quality, of a small size and narrow size distribution. An aerosol is generated from liquid feed and sent to a furnace, where liquid in droplets in the aerosol is vaporized to permit formation of the desired particles, which are then collected in a particle collector. The aerosol generation involves preparation of a high quality aerosol, with a narrow droplet size distribution, with close control over droplet size and with a high droplet loading suitable for commercial applications. Powders may have high resistance to oxidation of palladium. Multi-phase particles are provided including a palladium-containing metallic phase and a second phase that is dielectric. Electronic components are provided manufacturable using the powders.

摘要翻译： 本发明提供含钯粉末以及制造质量好，体积小，分布狭窄的含钯粒子的方法和装置。从液体进料产生气溶胶并将其送入炉中，其中气雾剂中的液滴中的液体被蒸发以允许形成所需的颗粒，然后将其收集在颗粒收集器中。气溶胶生成涉及制备具有窄液滴尺寸分布的高质量气溶胶，其具有对液滴尺寸的紧密控制以及适用于商业应用的高液滴负载。粉末可能具有高的抗氧化性能。提供了包括含钯金属相和电介质的第二相的多相颗粒。使用粉末可以制造电子部件。