- 专利标题: Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
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申请号: US13894989申请日: 2013-05-15
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公开(公告)号: US09739998B2公开(公告)日: 2017-08-22
- 发明人: Joerg Muchow , Helmut Grutzeck , Jochen Franz , Zoltan Lestyan
- 申请人: Joerg Muchow , Helmut Grutzeck , Jochen Franz , Zoltan Lestyan
- 申请人地址: DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Norton Rose Fulbright US LLP
- 代理商 Gerard Messina
- 优先权: DE102012208117 20120515
- 主分类号: G02B26/00
- IPC分类号: G02B26/00 ; G02B26/08 ; G02B26/10 ; B81B3/00
摘要:
A micromechanical assembly having a holder, a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame and which is joined to the holder via at least one frame spring, a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the two mirror springs and being adjustable about a mirror axis of rotation in relation to the drive frame, and the mirror element being suspended from the drive frame asymmetrically relative to the mirror axis of rotation. A method for manufacturing a micromechanical assembly is also described. A method for operating a micromechanical assembly is also described.
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