公开(公告)号：US09739998B2

公开(公告)日：2017-08-22

申请号：US13894989

申请日：2013-05-15

申请人： Joerg Muchow ,  Helmut Grutzeck ,  Jochen Franz ,  Zoltan Lestyan

发明人： Joerg Muchow ,  Helmut Grutzeck ,  Jochen Franz ,  Zoltan Lestyan

IPC分类号： G02B26/00 ,  G02B26/08 ,  G02B26/10 ,  B81B3/00

CPC分类号： G02B26/00 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/085 ,  G02B26/105 ,  Y10T29/4902

摘要： A micromechanical assembly having a holder, a drive frame which has at least one energizable coil device disposed at least one of on and in the drive frame and which is joined to the holder via at least one frame spring, a mirror element that is at least partially framed by the drive frame and is suspended from the drive frame by a first mirror spring and a second mirror spring, the mirror element being disposed between the two mirror springs and being adjustable about a mirror axis of rotation in relation to the drive frame, and the mirror element being suspended from the drive frame asymmetrically relative to the mirror axis of rotation. A method for manufacturing a micromechanical assembly is also described. A method for operating a micromechanical assembly is also described.

公开(公告)号：US20150036203A1

公开(公告)日：2015-02-05

申请号：US14364991

申请日：2012-10-23

申请人： Heiko Nitsche ,  Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Helmut Grutzeck ,  Zoltan Lestyan

发明人： Heiko Nitsche ,  Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Helmut Grutzeck ,  Zoltan Lestyan

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0833 ,  B81B3/0043 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0163 ,  G02B7/1821 ,  G02B26/101 ,  G02B26/105

摘要： A micromirror including a first layer having a first main extension plane, and a second layer having a second main extension plane, the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate. A two-mirror system having such a micromirror is also provided.

摘要翻译： 一种微镜，包括具有第一主延伸面的第一层和具有第二主延伸面的第二层，第一主延伸面和第二主延伸面相互平行，第一层和第二层为 通过至少一个连接区域彼此分开连接，至少一个弹簧元件被实施在第一层中，可移动悬挂的镜板被实施在第二层中，镜板具有在平行于第二层的第一侧上的镜面 主延伸平面并经由连接区域连接到弹簧元件的锚固件的相对的第二侧上，反射镜板的第二侧上的弹簧元件的一部分相对于镜板可移动地定位。 还提供了具有这种微镜的双镜像系统。

公开(公告)号：US20120133242A1

公开(公告)日：2012-05-31

申请号：US13320712

申请日：2010-05-18

申请人： Frederic Njikam Njimonzie ,  Joerg Muchow ,  Zoltan Lestyan ,  Wolfram Schock

发明人： Frederic Njikam Njimonzie ,  Joerg Muchow ,  Zoltan Lestyan ,  Wolfram Schock

IPC分类号： H02N1/00 ,  H05K13/00

CPC分类号： G02B26/0841 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  Y10T29/49002

摘要： A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component.

摘要翻译： 微机械部件具有外部定子电极部件和外部致动器电极部件，其经由至少一个外部弹簧连接到保持器，可调节元件可围绕第一旋转轴线调节，通过在外部致动器电极部件 和外部定子电极部件，并且具有内部定子电极部件和内部致动器电极部件，所述内部致动器电极部件具有设置在其上的至少一个电极指的第一网状物，所述可调节元件可围绕第二旋转轴线调节， 内部致动器电极部件的至少一个电极指和内部定子电极部件，内部致动器电极部件通过沿着第二旋转轴线取向的中间弹簧连接到外部致动器电极部件。 还描述了一种用于微机械部件的制造方法。

公开(公告)号：US08462415B2

公开(公告)日：2013-06-11

申请号：US13106453

申请日：2011-05-12

申请人： Stefan Pinter ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

发明人： Stefan Pinter ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

IPC分类号： G02B26/08

CPC分类号： G02B26/0833 ,  B81B7/008 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154

摘要： A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion.

摘要翻译： 用于微机械振荡装置，特别是微机械振荡镜的连接结构。 另一方面，连接结构至少间接地可连接到微机械振荡结构，另一方面，用于测量微机械振荡结构的扭转，并且包括至少一个，特别是至少两个 ，优选三个平行于微机械振荡结构的旋转轴线的腿部，以及至少一个垂直于旋转轴线设置的另外的腿部。 平行于旋转轴线的连接结构的延伸部至少有两倍的时间，特别是连接结构的垂直于旋转轴的延伸的三倍，并且包括至少一个用于测量扭转的电阻元件 的连接结构，电阻元件位于连接结构经受扭转时增加的机械应力的区域。

公开(公告)号：US08813573B2

公开(公告)日：2014-08-26

申请号：US13321625

申请日：2010-05-18

申请人： Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Zoltan Lestyan

发明人： Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Zoltan Lestyan

IPC分类号： G01B7/16

CPC分类号： G02B26/0833 ,  H02N1/006

摘要： A micromechanical component includes: an adjustable element connected to a holder at least via a spring; a first sensor device with at least one first piezo-resistive sensor element, which first sensor device provides a first sensor signal relating to a first mechanical stress, the first piezo-resistive sensor element being situated on or in an anchoring region of the spring; and a second sensor device with at least one second piezo-resistive sensor element, which second sensor device provides a second sensor signal relating to a second mechanical stress, the second piezo-resistive sensor element being situated on or in an anchoring region of the spring.

摘要翻译： 微机械部件包括：至少通过弹簧连接到保持器的可调元件; 具有至少一个第一压阻传感器元件的第一传感器装置，所述第一传感器装置提供与第一机械应力相关的第一传感器信号，所述第一压阻传感器元件位于所述弹簧的锚定区域上或其中; 以及具有至少一个第二压阻传感器元件的第二传感器装置，所述第二传感器装置提供与第二机械应力相关的第二传感器信号，所述第二压阻传感器元件位于所述弹簧的锚定区域上或其中 。

公开(公告)号：US20120125117A1

公开(公告)日：2012-05-24

申请号：US13321625

申请日：2010-05-18

申请人： Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Zoltan Lestyan

发明人： Frederic Njikam Njimonzie ,  Wolfram Schock ,  Joerg Muchow ,  Zoltan Lestyan

IPC分类号： G01B7/16 ,  H01L41/22

CPC分类号： G02B26/0833 ,  H02N1/006

摘要： A micromechanical component includes: an adjustable element connected to a holder at least via a spring; a first sensor device with at least one first piezo-resistive sensor element, which first sensor device provides a first sensor signal relating to a first mechanical stress, the first piezo-resistive sensor element being situated on or in an anchoring region of the spring; and a second sensor device with at least one second piezo-resistive sensor element, which second sensor device provides a second sensor signal relating to a second mechanical stress, the second piezo-resistive sensor element being situated on or in an anchoring region of the spring.

摘要翻译： 微机械部件包括：至少通过弹簧连接到保持器的可调元件; 具有至少一个第一压阻传感器元件的第一传感器装置，所述第一传感器装置提供与第一机械应力相关的第一传感器信号，所述第一压阻传感器元件位于所述弹簧的锚定区域上或其中; 以及具有至少一个第二压阻传感器元件的第二传感器装置，所述第二传感器装置提供与第二机械应力相关的第二传感器信号，所述第二压阻传感器元件位于所述弹簧的锚定区域上或其中 。

公开(公告)号：US20110286069A1

公开(公告)日：2011-11-24

申请号：US13106453

申请日：2011-05-12

申请人： Stefan PINTER ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

发明人： Stefan PINTER ,  Andreas Duell ,  Joerg Muchow ,  Zoltan Lestyan

IPC分类号： G02B26/08

CPC分类号： G02B26/0833 ,  B81B7/008 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154

摘要： A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion.

摘要翻译： 用于微机械振荡装置，特别是微机械振荡镜的连接结构。 另一方面，连接结构至少间接地可连接到微机械振荡结构，另一方面，用于测量微机械振荡结构的扭转，并且包括至少一个，特别是至少两个 ，优选三个平行于微机械振荡结构的旋转轴线的腿部，以及至少一个垂直于旋转轴线设置的另外的腿部。 平行于旋转轴线的连接结构的延伸部至少有两倍的时间，特别是连接结构的垂直于旋转轴的延伸的三倍，并且包括至少一个用于测量扭转的电阻元件 的连接结构，电阻元件位于连接结构经受扭转时增加的机械应力的区域。

公开(公告)号：US09360664B2

公开(公告)日：2016-06-07

申请号：US14471582

申请日：2014-08-28

申请人： Simon Armbruster ,  Helmut Grutzeck ,  Frank Schatz ,  Joerg Muchow ,  Frederic Njikam Njimonzie ,  Johannes Baader ,  Kerrin Doessel ,  Rainer Straub

发明人： Simon Armbruster ,  Helmut Grutzeck ,  Frank Schatz ,  Joerg Muchow ,  Frederic Njikam Njimonzie ,  Johannes Baader ,  Kerrin Doessel ,  Rainer Straub

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0858

摘要： A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.

摘要翻译： 描述微机械部件和微机械部件的制造方法。 该组件具有：一个框架; 板簧，其连接到所述框架并且具有背面和远离所述前侧的前侧和后侧; 镜片元件位于板簧的前侧，并连接到板簧的前侧，使得镜元件悬挂在框架上以便能够移位; 以及连接到所述板簧的后侧的至少一个压电条; 所述板簧通过向所述至少一个压电条施加电压而可弹性变形，以便使所述镜元件移位。

公开(公告)号：US06782756B2

公开(公告)日：2004-08-31

申请号：US10239470

申请日：2003-01-09

申请人： Joerg Muchow ,  Jochen Franz ,  Uwe Lipphardt ,  Andreas Duell ,  Wolfgang Romes

发明人： Joerg Muchow ,  Jochen Franz ,  Uwe Lipphardt ,  Andreas Duell ,  Wolfgang Romes

IPC分类号： G01L900

CPC分类号： G01L9/0054

摘要： A micromechanical component, in particular a pressure sensor, including a substrate that has a membrane region, a surrounding region of the membrane region, at least one measuring resistance provided in the membrane region and modifiable by deformation of the membrane region, and a corresponding evaluation circuit provided in the surrounding region. An interference effect on the measuring resistance is producible by way of a deformation of parts, in particular conductor paths, of the evaluation circuit relative to the substrate. The invention also creates a corresponding equalization method on a test chip or as an individual final equalization.

摘要翻译： 一种微机械部件，特别是压力传感器，包括具有膜区域的基板，膜区域的周围区域，设置在膜区域中的至少一个测量电阻，并且可以通过膜区域的变形而修改，以及相应的评估 电路设在周边地区。 测量电阻的干涉效应可以通过评估电路相对于衬底的部件，特别是导体路径的变形来产生。 本发明还在测试芯片上或作为单独的最终均衡产生相应的均衡方法。

公开(公告)号：US20110261428A1

公开(公告)日：2011-10-27

申请号：US12998538

申请日：2009-09-16

申请人： Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

发明人： Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC分类号： G02B26/10 ,  G01J1/42

CPC分类号： G02B26/0833 ,  G02B27/01 ,  Y10S359/90

摘要： A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.

摘要翻译： 微机械部件具有光窗口; 相对于所述光窗可从第一位置调节到关于至少一个旋转轴线的至少一个第二位置的反射镜元件;光学传感器，具有被设计成确定所述检测表面上的光强度的检测表面，并且提供对应的 传感器信号。 光窗，第一位置的反射镜元件和检测表面彼此相对设置，使得在光窗上反射的光束的一部分至少部分地撞击检测表面; 以及评估单元，其被设计为基于传感器信号来定义关于镜元件的瞬时位置和/或偏转光束的瞬时强度的信息。