Invention Grant
- Patent Title: Multi-beam electron microscope for electron channeling contrast imaging of semiconductor material
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Application No.: US15185920Application Date: 2016-06-17
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Publication No.: US09741532B1Publication Date: 2017-08-22
- Inventor: Stephen W. Bedell , Kunal Mukherjee , John A. Ott , Devendra K. Sadana , Brent A. Wacaser
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Louis J. Percello, Esq.
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/26 ; H01J37/20 ; H01J37/244 ; H01J37/06 ; H01J37/21

Abstract:
A multi-beam electron microscope for ECCI is provided. The electron microscope has a platform, on which a crystalline sample is placed. At least a first electron source and a second electron source of the electron microscope are mounted to a housing. The housing is tiltable with respect to a longitudinal direction through a pivot for forming a fulcrum, such that the first electron source and the second electron source are tilted simultaneously and are substantially equally distanced from the platform along a vertical axis when the housing is tilted. The electron microscope also has electron beam focusing assemblies for focusing the electron beams generated by the electron sources onto the crystalline sample to generate backscattered electrons. The electron microscope also has detectors for detecting the backscattered electrons.
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