Invention Grant
- Patent Title: Integrated gas sensor device, in particular for detecting carbon monoxide (CO)
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Application No.: US14318321Application Date: 2014-06-27
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Publication No.: US09746439B2Publication Date: 2017-08-29
- Inventor: Fabrizio Porro , Valeria Casuscelli , Francesco Foncellino , Giovanna Salzillo , Luigi Giuseppe Occhipinti
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITMI2013A1096 20130628
- Main IPC: G01N27/00
- IPC: G01N27/00 ; G01N27/26 ; G01N27/404 ; G01N33/00

Abstract:
It is described an integrated gas sensor device comprising a silicon substrate and an oxide layer on the silicon substrate, as well as a working electrode, a counter electrode and a reference electrode, on the oxide layer, the working electrode and the counter electrode having respective active area exposed to an environmental air through at least a plurality of first openings and a plurality of second openings in the oxide layer in correspondence of the working electrode and of the counter electrode, further comprising an electrolyte layer portion and a hydrogel layer portion on the electrolyte layer portion, the electrolyte and hydrogel layer portions having a same size, suitable to cover at least the working, counter and reference electrodes, the hydrogel layer portion acting as a “quasi solid state” water reservoir.
Public/Granted literature
- US20150001076A1 INTEGRATED GAS SENSOR DEVICE, IN PARTICULAR FOR DETECTING CARBON MONOXIDE (CO) Public/Granted day:2015-01-01
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