Invention Grant
- Patent Title: Cu—Ga alloy sputtering target and method for producing same
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Application No.: US15113210Application Date: 2014-11-18
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Publication No.: US09748080B2Publication Date: 2017-08-29
- Inventor: Yuuki Yoshida , Kouichi Ishiyama , Satoru Mori
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Priority: JP2014-013184 20140128
- International Application: PCT/JP2014/080465 WO 20141118
- International Announcement: WO2015/114914 WO 20150806
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; B22F3/10 ; C22C9/00 ; B22F1/00 ; C22C1/04 ; B22F3/24 ; H01L31/0749

Abstract:
According to the present invention, a Cu—Ga alloy sputtering target which is a sintered body has a composition with 29.5 atom % to 43.0 atom % of Ga and a balance of Cu and inevitable impurities. A Cu—Ga alloy crystal particle in the sintered body has a structure in which γ phase particles are dispersed in a γ1-phase crystal particle. A method for producing the sputtering target includes a step of performing normal pressure sintering by heating a molded body formed of a powder mixture of a pure Cu powder and a Cu—Ga alloy powder in a reducing atmosphere, and a step of cooling the obtained sintered body at a cooling rate of 0.1° C./min to 1.0° C./min, at a temperature having a range of 450° C. to 650° C.
Public/Granted literature
- US20170011895A1 Cu-Ga ALLOY SPUTTERING TARGET AND METHOD FOR PRODUCING SAME Public/Granted day:2017-01-12
Information query
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