Invention Grant
- Patent Title: Multiple-pattern forming methods
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Application No.: US14836050Application Date: 2015-08-26
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Publication No.: US09753370B2Publication Date: 2017-09-05
- Inventor: Chang-Young Hong , Cheng-Bai Xu , Jung Woo Kim , Cong Liu , Shintaro Yamada , Lori Anne Joesten , Choong-Bong Lee , Phillip D. Hustad , James C. Taylor
- Applicant: Rohm and Haas Electronic Materials LLC , Dow Global Technologies LLC , Rohm and Haas Electronic Materials Korea Ltd.
- Applicant Address: US MI Midland US MA Marlborough KR
- Assignee: Dow Global Technologies LLC,Rohm and Haas Electronic Materials LLC,Rohm and Haas Electronic Materials Korea Ltd.
- Current Assignee: Dow Global Technologies LLC,Rohm and Haas Electronic Materials LLC,Rohm and Haas Electronic Materials Korea Ltd.
- Current Assignee Address: US MI Midland US MA Marlborough KR
- Agent Jonathan D. Baskin
- Main IPC: G03F7/40
- IPC: G03F7/40 ; H01L21/027 ; G03F7/32 ; G03F7/039 ; G03F7/20 ; H01L21/033

Abstract:
Multiple-pattern forming methods are provided. The methods comprise: (a) providing a semiconductor substrate comprising one or more layers to be patterned; (b) forming a photoresist layer over the one or more layers to be patterned, wherein the photoresist layer is formed from a composition comprising: a matrix polymer comprising an acid labile group; a photoacid generator; and a solvent; (c) patternwise exposing the photoresist layer to activating radiation; (d) baking the exposed photoresist layer; (e) contacting the baked photoresist layer with a first developer to form a first resist pattern; (f) treating the first resist pattern with a coating composition comprising an expedient for switching solubility of a sidewall region of the first resist pattern from soluble to insoluble with respect to a second developer that is different from the first developer; and (g) contacting the treated first resist pattern with the second developer to remove portions of the first resist pattern, leaving the solubility-switched sidewall region to form a multiple-pattern. The methods have particular applicability to the semiconductor manufacturing industry for the formation of fine lithographic patterns.
Public/Granted literature
- US20160062232A1 MULTIPLE-PATTERN FORMING METHODS Public/Granted day:2016-03-03
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