- 专利标题： Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, GATE-short-configured, and TS-short-configured, NCEM-enabled fill cells
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申请号： US15371842申请日： 2016-12-07
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公开(公告)号： US09761573B1公开(公告)日： 2017-09-12
- 发明人: Stephen Lam , Dennis Ciplickas , Tomasz Brozek , Jeremy Cheng , Simone Comensoli , Indranil De , Kelvin Doong , Hans Eisenmann , Timothy Fiscus , Jonathan Haigh , Christopher Hess , John Kibarian , Sherry Lee , Marci Liao , Sheng-Che Lin , Hideki Matsuhashi , Kimon Michaels , Conor O'Sullivan , Markus Rauscher , Vyacheslav Rovner , Andrzej Strojwas , Marcin Strojwas , Carl Taylor , Rakesh Vallishayee , Larg Weiland , Nobuharu Yokoyama
- 申请人： PDF Solutions, Inc.
- 申请人地址： US CA San Jose
- 专利权人： PDF Solutions, Inc.
- 当前专利权人： PDF Solutions, Inc.
- 当前专利权人地址： US CA San Jose
- 代理商 David Garrod
- 主分类号： H01L29/00
- IPC分类号： H01L29/00 ; H01L27/02 ; H01L21/66 ; H01L29/417 ; H01L23/528 ; G06F17/50 ; G06F11/07
摘要：
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one GATECNT-short-related failure mode, and one TS-short-related failure mode.
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